MLL7401 Micro and Nanofabrication- Home Page

This is an bachelor level introductory course on solid state properties of materials.

Books:

• Madou, Marc. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2002. ISBN: 9780849308260.
• Campbell, Stephen. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.
• Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice, and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 9780130850379.

Course Timing:

Monday and Thursday 5 AM

Teaching Assistants: Apurva Yadav

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